专利名称：NANOPOSITIONER发明人：CLARKE, John Andrew Grant申请号：EP16723148.9申请日：20160506公开号：EP3292569A1公开日：20180314
摘要：We describe a nanopositioning device comprising: a mount and a moving stageheld within said mount, preferably by sets of flexures on opposite sides of the stage suchthat the stage is displaceable in a longitudinal direction within said mount. A piezoelectricactuator is mechanically coupled to said stage to controllably displace the stage in alongitudinal direction. In embodiments the flexures comprise metal leaves having a planeextending between the stage and the mount perpendicular to said longitudinal direction.The device includes various additional features to improve resolution, frequencyresponse and the like.
申请人：Elektron Technology UK Limited
地址：Elektron Technology PLC Broers Building 21 J J Thomson Avenue Cambridge,Cambridgeshire CB3 0FA GB
国籍：GB
代理机构：Pinney, Matthew David
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