专利名称：Method of manufacturing fluidic angular
rate sensor
发明人：Takahashi, Fumitaka,Okazaki, Kunio,Shiraishi,
Masaru,Takahashi, Masayuki
申请号：EP88108523.7申请日：19880527公开号：EP0292999A3公开日：19890802
摘要：A method of manufacturing a fluidic angular rate sensor of the type that finewires such as tungsten wires are tensely spread over the heads of two pairs of metalsupports which are mounted on a ceramic disc having fluid passage apertures, includesthe steps of: plating a gold on the wires and fixedly spreading the wires over the metalsupports by means of thermocompression bonding or the like; and heating the wires in apredetermined atmosphere which allows the plated gold to be removed and the wires tobe crystalized.
申请人：HONDA MOTOR COMPANY LTD.,Stanley Electric Co., Ltd.
地址：1-1, Minami Aoyama 2-chome Minato-ku Tokyo JP,2-9-13, Nakameguro Meguro-ku Tokyo 153 JP
国籍：JP,JP
代理机构：Schaumburg, Thoenes & Thurn
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