ALIGNMENT METHOD, ALIGNMENT APPARATUS, AND ALIGNME

专利名称：ALIGNMENT METHOD, ALIGNMENT

APPARATUS, AND ALIGNMENT SCREEN FOROBJECTIVE-LENS GUIDING DEVICE

发明人：Tadashi HIRATA申请号：US11830692申请日：20070730

公开号：US20080049311A1公开日：20080228

专利附图：

摘要：An end face of a narrow-diameter end portion is easily disposed at a correctposition on an examination object without setting an examination site, thus enabling rapid

and straightforward acquisition of an image of the examination site. The inventionprovides an alignment method for a guiding device which is attached to an end of anobjective lens in such a manner as to be capable of positional adjustment in an optical axisdirection and which is brought into contact with an examination target to make a focalposition of the objective lens coincident with an examination site. The alignment methodcomprises securing, to an end face of the guiding device, an alignment screen, having apredetermined pattern; relatively moving the objective lens and the guiding device, towhich the alignment screen is secured, in the optical axis direction; fixing relative positionsof the objective lens and the guiding device at a position where an in-focus image of thepattern of the alignment screen is obtained, or at a position further relatively shifted by apredetermined distance from that position; and removing the alignment screen from theguiding device.

申请人：Tadashi HIRATA

地址：Hachioji-shi JP

国籍：JP

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