专利名称：Apparatus and method for testing of
microscale to nanoscale thin films
发明人：Amanul Haque,Muhammed Taher Abu Saif申请号：US10241748申请日：20020911
公开号：US20030057993A1公开日：20030327
专利附图：
摘要：Apparatus and method for testing a thin film material. A chip is fabricated thatincludes the specimen to be tested, held by a force sensor beam at a first longitudinalend and by a support structure at a second longitudinal end. The chip is configured to be
placed into a testing environment for quantitative and qualitative material propertytesting of the specimen. Methods are also provided for fabricating a testing chip.
申请人：UNIVERSITY OF ILLINOIS AT URBANA
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