专利名称：Method and apparatus for detection of
particles in ultra-pure liquids using acousticscattering and cavitation
发明人：Sameer I. Madanshetty申请号：US08/621511申请日：19960325公开号：US05594165A公开日：19970114
摘要：A method of detecting particles in ultra-clean liquids using acoustic scatteringand cavitation comprises inducing gas caps to form on the particles. The gas caps arethen separated from the particles to form bubbles in the liquid. An acoustic signaturereceived as an echo from the bubbles is detected. The detection of the acoustic signatureindicates the presence of particles in the liquid.
申请人：TRUSTEES OF BOSTON
代理机构：Baker & Botts, LP.
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